DSA Process Controller Skill

DSA Process Controller

Purpose

The DSA Process Controller skill provides directed self-assembly process control for block copolymer lithography and nanoparticle templating, enabling sub-lithographic patterning through controlled polymer phase separation.

Capabilities

Block copolymer selection and design
Annealing protocol optimization
Defect density analysis
Pattern transfer protocols
Graphoepitaxy and chemoepitaxy
Long-range order characterization

Usage Guidelines

DSA Process Control

BCP Selection
- Match pitch to target
- Consider chi-N product
- Select morphology (lamellar, cylindrical)
Annealing Optimization
- Choose thermal vs solvent vapor
- Optimize temperature/time
- Achieve equilibrium morphology
Defect Analysis
- Classify defect types
- Quantify defect density
- Identify root causes

Process Integration

Directed Self-Assembly Process Development
Nanolithography Process Development

Input Schema

{
  "bcp_system": "string (e.g., PS-b-PMMA)",
  "target_pitch": "number (nm)",
  "morphology": "lamellar|cylindrical|spherical",
  "guiding_type": "graphoepitaxy|chemoepitaxy",
  "substrate_pattern": "string"
}

Output Schema

{
  "annealing_protocol": {
    "method": "thermal|svA",
    "temperature": "number (C)",
    "time": "number (hours)",
    "solvent": "string (optional)"
  },
  "achieved_pitch": "number (nm)",
  "defect_density": "number (defects/um2)",
  "correlation_length": "number (nm)",
  "pattern_quality": "string"
}

Agent Skills: DSA Process Controller

Install this agent skill to your local

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